材料科学
微系统
光电子学
CMOS芯片
微电子机械系统
微流控
制作
纳米技术
作者
Ulrike Lehmann,M. Sergio,S. Pietrocola,Cristiano Niclass,Edoardo Charbon,Martin A. M. Gijs
出处
期刊:International Conference on Solid-State Sensors, Actuators and Microsystems
日期:2007-06-10
卷期号:2: 2493-2496
被引量:10
标识
DOI:10.1109/sensor.2007.4300677
摘要
We present a CMOS-based hybrid microfluidic system that combines the manipulation of magnetic microparticles through a magnetic field with in situ optical detection via single photon avalanche diodes (SPADs). Magnetic particles are actuated within a glass micro-capillary and are detected upon passage over the SPAD, where they block incident light and thus lower the photon count. The optical sensors, which are not influenced by the magnetic actuation forces, allow detecting the presence of magnetic particles of 30, 5 and 1 mum diameter, while being able to distinguish between different sizes.
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