Fabrication of Nano-pore Array Structure TiO_2 by Anodizing of Titanium Film

TiO2 nano-pore array structure was prepared by anodizing of PVD titanium film in 1% HF solution.The researches show that the shape of the pore in TiO2 nano-pore film is circular and its distribution is uniform.The size of the pore is about 50 nm.Under the same anodizing time conditions,the thickness of TiO2 nano-pore film prepared at 15℃ 1% HF solution is thicker than that prepared at 25℃ 1% HF solution.The longer the anodizing time is,the thicker the TiO2 film is.