Effect of Proton Irradiation on the Properties of High-Voltage Integrated 4H-SiC Schottky Diodes at Operating Temperatures

The effect of proton irradiation (proton energy 15 MeV) on the parameters of high-voltage 4H-SiC integrated Schottky diodes (JBS) was studied for the first time in the operating temperature range Ti (23 and 175°C). The blocking voltage of the diodes under study, Ub, was 600 and 1700 V. For devices with Ub = 600 V, the fluence range was 5 × 1013–1 × 1014 cm–2; for devices with Ub = 1700 V, the fluence range was 3 × 1013–6 × 1013 cm–2. An increase in the irradiation temperature leads to a noticeable decrease in the effect of irradiation on the current–voltage characteristics of the diodes. The effect of annealing on the current-voltage characteristics of irradiated devices is studied.