驻极体
微电子机械系统
执行机构
能量收集
传感器
材料科学
数码产品
计算机科学
电气工程
工程类
能量(信号处理)
纳米技术
物理
量子力学
复合材料
标识
DOI:10.1109/ise.2002.1042972
摘要
Electrets are truly a low energy device. Use of electrets; in electronic devices such as sensors, actuators and transducers save considerable energy. Electret integrated devices and smart materials are developing in hybrid form with silicon as next generation microelectromechanical systems. Recent advances in electret technology offer promise to serve mankind through medical prosthesis and by performing other biological functions. In this article, we present an integrated view of electret applications in energy and health sectors.
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