Heterogeneous integration of compact lithium niobate microring and Mach-Zehnder modulator on silicon

Submicron thin film of lithium niobate are heterogeneously integrated on silicon substrates and rib-loaded with index-matching materials for compact waveguide formation. High-Q microring modulators and low-voltage and high-modulation-depth Mach-Zehnder modulators are demonstrated. The devices have high potential for digital (datacom) and analog (microwave photonic) applications.