A WO3Nanoparticles NO Gas Sensor Prepared by Hot-Wire CVD

In this letter, a WO ₃ nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO ₃ nanoparticle gas sensor prepared at an annealing temperature of 400°C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO ₃ nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150°C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.