Properties of Amorphous Silicon Prepared by Decomposition of Silane

Hydrogenerated amorphous silicon is usually prepared by decomposition of silane at low temperature T < 400°C in a glow discharge environment. Recently we have explored a novel process involving thermal decomposition of silane around 600°C followed by post-hydrogenation in a hydrogen plasma. The physical properties of this type of film are discussed and compared to those of films prepared in the usual way.