3D Hierarchical MoS 2 ‐Based Piezoresistive Pressure Sensors With Ultrahigh Sensitivity and Wide Dynamic Range

ABSTRACT The rapid advancements in artificial intelligence, wearable devices, and the Internet of Things underscore the growing importance of sensor technology, particularly pressure sensors, for driving innovation across various fields. Wide‐dynamic‐range pressure sensors that exhibit high sensitivity without being biased toward a specific range are therefore needed. We propose an ultrahigh‐sensitivity, wide‐dynamic‐range pressure sensor that integrates 3D hierarchical (3DH) MoS 2 as the sensing material with a polymer cavity structure. 3DH MoS 2 is directly synthesized on a polymer substrate using a low‐temperature metal–organic chemical vapor deposition process, eliminating the need for additional patterning. The fabricated pressure sensor, with a sensitivity of ∼23 000 kPa −1 , benefits from the hierarchical multiscale structure, and the polymer cavity enables detection across a broad range of 0.135–80 kPa. Furthermore, by optimizing the synthesis conditions, we demonstrate that the sensitivity and detection range of the sensor are influenced by the material composition. These studies not only lay the foundation for the development of next‐generation wearable electronics but also are expected to broaden the application scope of 3D‐structured transition‐metal dichalcogenides in sensor technologies.