Global modeling of hiPIMS systems: Transition from homogeneous to self organized discharges
作者
Sara Gallian,Jan Trieschmann,Thomas Mussenbrock,W. N. G. Hitchon,Ralf Peter Brinkmann
标识
DOI:10.1109/plasma.2014.7012495
摘要
High Power Impulse Magnetron Sputtering (HiPIMS) discharges are characterized by a near-target magnetized region, where the confined electrons ionize a consistent fraction of both the gas and the sputtered neutrals. HiPIMS discharges are dynamical systems, evolving through different regimes of operation: both the plasma composition and the plasma spatial organization change during the pulse [1].