Sub-wavelength waveguide Michelson interferometer sensors

Evanescent field silicon photonics in a silicon-on-insulator or silicon-nitride-on-insulator platforms have been effectively utilized to demonstrate chemical and biosensors over the past decade with applications in the detection of nucleic acids and protein biomarkers for cancers, viruses and infectious diseases, and environmental toxins. By balancing the requirements for efficient low-loss transmission through the waveguide and enhancing light-matter interaction such as with molecules binding on the high index material surfaces in resonant microcavities, slow light and interferometer geometries, various high sensitivity biosensors have been experimentally demonstrated down to few femtograms/ml. various slotted microcavities and waveguides have been experimentally demonstrated. In recent years, subwavelength waveguides have demonstrated high bulk spectral sensitivities approaching ~500nm/RIU (RIU=refractive index unit) in periodic structures with lattice constant (Λ) <<(λ/2n_eff) where n_eff is the effective index at wavelength λ. While most experimental demonstrations have been in subwavelength ring resonator geometries, in this research, in addition to experimental demonstration of bulk spectral sensitivity ~775nm/RIU in subwavelength waveguides in interferometer configurations, we investigate optimized geometries that can reach sensitivities ~70,000nm/RIU in compact dimensions. In contrast to Mach-Zehnder interferometer (MZI) sensors of the same geometric interferometer arm lengths, the reflected path in Michelson interferometers (MI) doubles the optical path length, and thus effectively doubles the phase shift in the presence of an analyte. The interference fringe linewidths are narrowed compared to the equivalent MZI and would thus enable smaller changes in analyte concentration to be discerned from the fringe spectra.