Preliminary optical characterization of integrated electrically biased suspended graphene membranes

Tunable light sources gain considerable interest as key components in various spectroscopic systems, e.g. for gas or chemicals detection. A novel approach to employ new active materials for such sources is aimed by the TAGGED consortium and relies on the integration of electrically biased graphene membrane with electrostatically actuated membrane which will allow tuning of source wavelength in visible or IR range. In this work, preliminary results of optical characterization of electrically biased graphene chips are presented. Graphene was grown on a copper foil using chemical vapor deposition technique. After the growth it was transferred over the trenches of silicon chips. Fabricated chips contain several test structures for suspending the graphene membranes, and electrical contacts to the membranes for biasing. Presented results pave the way to fully integrated miniaturized opto-electric-mechanical tunable light sources.