栅栏
光学
外差(诗歌)
闪耀光栅
干涉测量
材料科学
衍射光栅
相(物质)
观测误差
超声波光栅
反射(计算机编程)
物理
计算机科学
统计
数学
量子力学
程序设计语言
声学
作者
Cheng-Chih Hsu,Chen-Ming Tsai,Chen-Yu Ye,Pei-Ling Chen,Tzu-Ti Lee,Zhi‐Xuan Dai
出处
期刊:Applied Optics
[Optica Publishing Group]
日期:2024-05-02
卷期号:63 (15): 4211-4211
被引量:2
摘要
This paper proposes an alternative method for grating period measurement based on heterodyne grating interferometry. The optical configurations for measuring the period of reflection/transmission gratings were demonstrated, and four commercially available gratings were used to evaluate the effectiveness of the proposed method. Based on the phase-lock technique, the grating period could be obtained immediately through the phase wrapped/unwrapped process. Under precise measurement conditions, the grating period measurement error of the proposed method was better than 1 nm, and the grating period difference between product specifications was less than 1%. In addition, the measurement results of the proposed method also exhibited high similarity with optical microscopy measurements.
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