Performance analysis of synthetic jet micropump based on double piezoelectric actuators

Abstract To alleviate the problem of low flow rates of synthetic jet piezoelectric pumps for liquid medium, a double piezoelectric synthetic jet micropump (DPSJM) is proposed. DPSJM generates pressure change in the pump chamber by the high voltage vibration of the double piezoelectric actuators. Theoretical models are used to analyze the factors affecting the performance of DPSJM. The flow field is analyzed by using the finite element method in the jet chamber, and the prototype is built and tested. The results show that the performance of the DPSJM is best with double piezoelectric actuators with a sine wave drive signal and a pump chamber height of 1 mm. The highest flow rate comes to 22.11 ml min −1 at 175 V, 65 Hz. Moreover, the DPSJM is simple in construction. When compared to other types of valveless piezoelectric pumps, there was no resistance fluid in the pump chamber, which could significantly reduce the damage to the transfer medium.