Influence of cylindrical magnetron sputtering configurations on plasma characteristics

In the present paper, the influence of cylindrical magnetron configurations on the fundamental plasma parameters of the axial magnetic field was described in more detail. The chamber of this system has consisted of two coaxial cylinders which are used as the electrodes of the system with the magnetic solenoid coil present in the outer cylinder to generate the axial profile of the magnetic field at different coil currents (from 2 A to 8 A). The plasma parameters of the normal glow discharge region are diagnosed. The results showed that the cylindrical magnetron configurations had a significant impact on the characteristics of the normal glow regions. The cylindrical magnetron configurations have slight effect on the axial profile of E × B drift velocity and the cyclotron frequency. By changing the configuration plasma parameters (The electron temperature, electron number density, and Debye length) their values changed.