Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum

Thin-film sensors have wide applications in the fields of high-temperature measurement, such as in the hot section of aero engines. Polymer-derived ceramics (PDCs) are diversified, ease to shape, and resistant to thermal shock. However, they are seldom used as sensitive parts of thin-film sensors due to the oxidation of PDC thin films. To solve this challenging problem, pyrolysis of PDC thin films in vacuum is proposed in this work, and the anti-oxidation performances are verified in a high-temperature sensor based on such a PDC thin film. The temperature measurement experiment shows that the PDC thin-film temperature sensor with thickness of about 10 µm pyrolyzed in vacuum can measure temperature from room temperature to 800 ℃, which provides a feasible way for fabrication of high-temperature PDC thin-film sensors such as heat flux sensors and strain sensors.