Lv4
424 积分 2025-04-03 加入
Modeling and real-time control of multi-zone thermal processing system for photoresist processing
2天前
已完结
Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles
9天前
已完结
Experimental and numerical investigations into the transient multi-wafer batch atomic layer deposition process with vertical and horizontal wafer arrangements
1个月前
已完结
Impedance matching design for capacitively coupled plasmas considering coaxial cables
1个月前
已完结
Computational investigations of impedance matching for pulsed capacitively coupled plasmas
2个月前
已完结
Power matching to pulsed inductively coupled plasmas
2个月前
已完结
A generalized external circuit model for electrostatic particle-in-cell simulations
2个月前
已完结
Self-consistent simulation of the impedance matching network for single frequency capacitively coupled plasma
3个月前
已完结
An automatic impedance matching system for a multi point power delivery continuous industrial microwave oven
3个月前
已完结
Modeling and control of L-type network impedance matching for semiconductor plasma etch
3个月前
已关闭
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