Lv3
366 积分 2025-04-03 加入
Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor
2小时前
待确认
Power dissipation during the ignition of pulse-modulated dual RF capacitively coupled argon plasmas at different pressures
7天前
已完结
An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes
7天前
已完结
Comprehensive understanding of the ignition process of a pulsed capacitively coupled radio frequency discharge: the effect of power-off duration
7天前
已完结
Computational investigations of impedance matching for pulsed capacitively coupled plasmas
7天前
已完结
Modeling and real-time control of multi-zone thermal processing system for photoresist processing
1个月前
已完结
Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles
1个月前
已完结
Experimental and numerical investigations into the transient multi-wafer batch atomic layer deposition process with vertical and horizontal wafer arrangements
3个月前
已完结
Impedance matching design for capacitively coupled plasmas considering coaxial cables
3个月前
已完结
Computational investigations of impedance matching for pulsed capacitively coupled plasmas
3个月前
已完结
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