| 标题 |
Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor |
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| DOI | |
| 其它 |
期刊:Surface and Coatings Technology 作者:Kirsten Bobzin; Ralf Peter Brinkmann; Thomas Mussenbrock; Nazlim Bagcivan; Ricardo Henrique Brugnara; et al 出版日期:2013-12-01 |
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(2025-6-4)