Lv7
4650 积分 2020-07-16 加入
Low-temperature and damage-free transition metal and magnetic material etching using a new metallic complex reaction
16天前
已完结
Damage-free Pattern Transfer by Low Energy Electron Enhanced Etching (LE4): Mechanisms and Applications
16天前
已完结
Advanced damage-free neutral beam etching technology to texture Si wafer with honeycomb pattern for broadband light trapping in photovoltaics
16天前
已完结
Reduction of etching plasma damage on low dielectric constant fluorinated amorphous carbon films by multiple H2 plasma treatment
16天前
已关闭
Low sidewall damage plasma etching using ICP-RIE with HBr chemistry of Si/SiGe resonant interband tunnel diodes
16天前
已完结
Super-selective cryogenic etching for sub-10 nm features
16天前
已完结
Low damage etching by Inductively Coupled Plasma Reactive Ion Etch (ICP-RIE) and Atomic Layer Etching (ALE) of III-V materials to enable next generation device performance
16天前
已完结
Plasma damage mechanisms in low k organosilicate glass and their inhibition by Ar ion bombardment
16天前
已关闭
Characterization of plasma-induced damage on TiN/HfO 2 /SiO 2 stacked structure during multi-Vt process for advanced CMOS using different dry etching gas chemistry
16天前
已完结
Characterizations of sidewall recombination behaviors of AlGaInP red light-emitting diodes with micron-scale mesa size by steam oxidation
1个月前
已完结
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