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10 积分 2026-08-08 加入
Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl
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OMCVD of cobalt and cobalt silicide
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Process and characteristics of cobalt films deposited by thermal atomic layer deposition and silicide film formed
1天前
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Area Selective Atomic Layer Deposition of Cobalt Thin Films
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Preliminary growth of metallic co films by thermal atomic layer deposition using RCpCo(CO)2 and alkylamine precursors
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Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
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