Lv3
400 积分 2025-03-14 加入
Role of NO in highly selective SiN/SiO2 and SiN/Si etching with NF3/O2 remote plasma: Experiment and simulation
1个月前
已完结
Highly selective etching of silicon nitride over silicon and silicon dioxide
1个月前
已完结
Silicon etching in NF3/O2 remote microwave plasmas
1个月前
已完结
Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures
1个月前
已完结
Vertically stacked gate-all-around Si nanowire transistors: Key Process Optimizations and Ring Oscillator Demonstration
1个月前
已完结
Vertically Stacked Gate-All-Around Si Nanowire CMOS Transistors with Reduced Vertical Nanowires Separation, New Work Function Metal Gate Solutions, and DC/AC Performance Optimization
1个月前
已完结
High-k metal gate fundamental learning and multi-V<inf>t</inf> options for stacked nanosheet gate-all-around transistor
1个月前
已完结
Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET
1个月前
已完结
Femtosecond laser welding of non-optical-contact ceramic and fused silica
3个月前
已完结
Tailoring sapphire–invar welds using burst femtosecond laser
3个月前
已完结
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