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30 积分 2023-08-25 加入
Physical and numerical methods of speeding up particle codes and paralleling as applied to RF discharges
2个月前
已完结
Fluid modelling of capacitively coupled radio-frequency discharges: a review
2个月前
已完结
Study on the third harmonic diagnosis and etching distribution analysis according to the phase change between the upper and lower RF electrodes in a 60 MHz capacitively coupled plasma triode reactor based high aspect ratio contact dry etching process
2个月前
已完结
On the Mechanisms of Symmetry Breaking in Plasma-Chemical High-Frequency Low-Pressure Capacitive Reactors
2个月前
已完结
Experimental and PIC MCC study of electron cooling—re-heating and plasma density decay in low pressure rf ccp argon afterglow
3个月前
已完结
Sheath properties of RF plasmas in a parallel plate etch reactor; the high-frequency regime (ω>ωi)
3个月前
已关闭
Analytical approaches to glow discharge problems
3个月前
已完结
Ion energy distribution measurements in rf and pulsed dc plasma discharges
3个月前
已完结
Effects of ‘step-like’ amplitude-modulation on a pulsed capacitively coupled RF discharge: an experimental investigation
3个月前
已完结
Nonlocal kinetics of the electrons in a low-pressure afterglow plasma
3个月前
已完结
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