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30 积分 2023-08-25 加入
Capacitive discharges driven by combined dc/rf sources
7小时前
已完结
Study on the third harmonic diagnosis and etching distribution analysis according to the phase change between the upper and lower RF electrodes in a 60 MHz capacitively coupled plasma triode reactor based high aspect ratio contact dry etching process
1个月前
已完结
Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma
2个月前
已完结
Electron and negative ion dynamics in a pulsed 100 MHz capacitive discharge produced in an O2 and Ar/O2/C4F8 gas mixture
2个月前
已完结
Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma
2个月前
已完结
Ion bombardment energy and SiO2/Si fluorocarbon plasma etch selectivity
3个月前
已完结
Effective secondary electron yields for different surface materials in capacitively coupled plasmas
4个月前
已完结
Studies of dynamic spatio-temporal processes of electrons in a 50 kHz/5 MHz dual-frequency dielectric barrier discharge plasma at atmospheric pressure
4个月前
已完结
Magnetic enhancement of the electrical asymmetry effect in capacitively coupled plasmas
4个月前
已完结
Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration
4个月前
已完结
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