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Impact of plasma treatment time on MOCVD-TiN properties and on the electrical performance of deep contacts
1小时前
已完结
Optimization of a TiN PE-MOCVD Process Using DoE Methodology
1小时前
已完结
Effect of process parameters on glow discharge and film thickness uniformity in facing target sputtering
10个月前
已完结
The erosion groove effects on RF planar magnetron sputtering
10个月前
已完结
Evolution Mechanism of Sputtered Film Uniformity with the Erosion Groove Size: Integrated Simulation and Experiment
10个月前
已完结
Fundamentals first, technology second
10个月前
已完结
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