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Effect of process parameters on glow discharge and film thickness uniformity in facing target sputtering
7个月前
已完结
The erosion groove effects on RF planar magnetron sputtering
7个月前
已完结
Evolution Mechanism of Sputtered Film Uniformity with the Erosion Groove Size: Integrated Simulation and Experiment
7个月前
已完结
Fundamentals first, technology second
7个月前
已完结
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