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Influence of controlled deposition rate on mechanical properties of sputtered Ti thin films for MEMS application
10小时前
待确认
Experimentally validated aluminum nitride based pressure, temperature and 3-axis acceleration sensors integrated on a single chip
6个月前
已完结
Novel thin-film piezoelectric aluminum nitride rate gyroscope
6个月前
已完结
High-Frequency AlN-on-Silicon Resonant Square Gyroscopes
6个月前
已完结
A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves
6个月前
已完结
Stress dependence of reactively sputtered aluminum nitride thin films on sputtering parameters
6个月前
已完结
Growth temperature dependence of structural properties for AlN films grown on (Mn,Zn)Fe2O4 substrates
6个月前
已完结
Morphological properties of chemical vapour deposited AlN films
6个月前
已完结
Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance
6个月前
已完结
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