Lv01
0 积分 2024-08-07 加入
Wafer-scale fabrication and growth mechanism investigation of silicon-based AlN piezoelectric films with c-axis orientation by magnetron sputtering
3小时前
已完结
Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls
3小时前
已完结
Impacts of substrate and growth temperature on the deposition and etching of c-axis oriented AlN piezoelectric thin films
3小时前
已完结
Extraction of D31 Piezoelectric Coefficient of AlN Thin Film
4小时前
已完结
Basic Properties of AlN Single Crystal
4小时前
已完结
CMOS-Integrated Aluminum Nitride MEMS: A Review
6小时前
已完结
A high-quality bimorph Sc-doped AlN deposition and characterisation process
3个月前
已完结
Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
4个月前
已完结
Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and doping
4个月前
已完结
Design of MEMS cylindrical gyroscope integrated with piezoelectric thin film
4个月前
已完结
皖公网安备34019202002308
