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30 积分 2024-08-07 加入
An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array
2个月前
已完结
An ultrasonic rangefinder based on an AlN piezoelectric micromachined ultrasound transducer
2个月前
已完结
Piezoelectric micromachined transducers (PMUT's) based on PZT thin films
2个月前
已完结
The study on the effect of pattern density distribution on the STI CMP process
2个月前
已完结
Wafer-scale modeling of pattern effect in oxide chemical mechanical polishing
2个月前
已完结
Wafer-level experimental study of residual stress in AlN-based bimorph piezoelectric micromachined ultrasonic transducer
2个月前
已完结
Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications
2个月前
已完结
Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications
2个月前
已完结
Review of piezoelectric micromachined ultrasonic transducers and their applications
2个月前
已完结
Effect of growth and residual stress in AlN (0002) thin films on MEMS accelerometer design
2个月前
已完结