Lv11
74 积分 2024-07-29 加入
Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
3小时前
已完结
Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma
1个月前
已完结
NF3 plasma-enhanced isotropic atomic layer etching of amorphous and crystalline hafnium oxide films
1个月前
已完结
Thermal atomic layer etching of SnO2 by fluorination and ligand-exchange/conversion reactions using sequential hydrogen fluoride and Al(CH3)3 exposures
1个月前
已关闭
Low-temperature atomic layer etching of platinum via sequential wet-like reactions of plasma oxidation and complexation
1个月前
已完结
Etchless lithium niobate metasurfaces for enhanced second-harmonic generation via Fabry-Pérot bound states in the continuum
1个月前
已完结
Atomic Layer Deposition: An Overview
2个月前
已完结
Thermal atomic layer etching of amorphous and crystalline Al2O3 films
4个月前
已关闭
Cross-stacking of guided-mode resonance gratings for polarization-independent flat-top filtering
4个月前
已完结
In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride
5个月前
已关闭
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