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Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma
1个月前
已完结
NF3 plasma-enhanced isotropic atomic layer etching of amorphous and crystalline hafnium oxide films
1个月前
已完结
Thermal atomic layer etching of SnO2 by fluorination and ligand-exchange/conversion reactions using sequential hydrogen fluoride and Al(CH3)3 exposures
1个月前
已关闭
Low-temperature atomic layer etching of platinum via sequential wet-like reactions of plasma oxidation and complexation
1个月前
已完结
Etchless lithium niobate metasurfaces for enhanced second-harmonic generation via Fabry-Pérot bound states in the continuum
1个月前
已完结
Atomic Layer Deposition: An Overview
2个月前
已完结
Thermal atomic layer etching of amorphous and crystalline Al2O3 films
4个月前
已关闭
Cross-stacking of guided-mode resonance gratings for polarization-independent flat-top filtering
4个月前
已完结
In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride
5个月前
已关闭
Surface reaction during thermal atomic layer etching of aluminum oxide films using fluorine radicals and trimethylaluminum
5个月前
已完结
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