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74 积分 2024-07-29 加入
Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
2小时前
待确认
Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
2天前
已完结
Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma
1个月前
已完结
NF3 plasma-enhanced isotropic atomic layer etching of amorphous and crystalline hafnium oxide films
1个月前
已完结
Thermal atomic layer etching of SnO2 by fluorination and ligand-exchange/conversion reactions using sequential hydrogen fluoride and Al(CH3)3 exposures
1个月前
已关闭
Low-temperature atomic layer etching of platinum via sequential wet-like reactions of plasma oxidation and complexation
1个月前
已完结
Etchless lithium niobate metasurfaces for enhanced second-harmonic generation via Fabry-Pérot bound states in the continuum
1个月前
已完结
Atomic Layer Deposition: An Overview
2个月前
已完结
Thermal atomic layer etching of amorphous and crystalline Al2O3 films
4个月前
已关闭
Cross-stacking of guided-mode resonance gratings for polarization-independent flat-top filtering
4个月前
已完结