| 标题 |
Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis |
| 网址 | |
| DOI | |
| 其它 |
期刊:Precision Engineering 作者:Jingjing Xia; Jun Yu; Siwen Lu; Chunan Xue; Yifan Zhu; et al 出版日期:2024-12-01 |
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(2025-6-4)