| 标题 |
Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition |
| 网址 | |
| DOI | |
| 其它 |
期刊:Nat Commun 作者:Choolakkal AH, Niiranen P, Dorri S, Birch J, Pedersen H 出版日期:2024-12-11 |
| 求助人 | |
| 下载 |
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(2025-6-4)