| 标题 |
Approach for enhancing sensitivity of tin-oxo cluster resist for high NA extreme UV lithography |
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| DOI | |
| 其它 |
期刊:Advances in Patterning Materials and Processes XLI 作者:Yejin Ku; Gayoung Kim; Minseung Kim; Jin-Kyun Lee; Jiho Kim; et al 出版日期:2024 |
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(2025-6-4)