| 标题 |
Back-End-of-Line Compatible Hf0.5Zr0.5O2 Ferroelectric Devices Enabled by Microwave Annealing |
| 网址 | |
| DOI | |
| 其它 |
期刊:Chip 作者:Yin-Chi Liu; Hao Zhang; Jining Yang; Dmitriy Anatolyevich Golosov; Xiaohan Wu; et al 出版日期:2024-12-01 |
| 求助人 | |
| 下载 |
PDF的下载单位、IP信息已删除
(2025-6-4)