| 标题 |
Investigation on Asymmetric HfO2-ZrO2-HfO2 Superlattice Gate Stacks with Ultra-Low EOT for Advanced Transistors |
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| DOI | |
| 其它 |
期刊:2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT) 作者:Haiyuan Lyu; Kun Zhong; Zhaohao Zhang; Huaxiang Yin 出版日期:2024-10-22 |
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(2025-6-4)