| 标题 |
Preparation of AlN Films and nc-AlN/a-SiNx Nanocomposite Films by Medium Frequency Magnetron Sputtering
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| 网址 | |
| DOI |
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| 其它 |
Journal of the Korean Physical Society 약어 : J. Korean Phys. Soc. 2005, vol.46, no.1, pp. 83-87 (5 pages) UCI : G704-000411.2005.46.1.047 |
| 求助人 | |
| 下载 |
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