| 标题 |
 Hybrid metrology for non-destructive lateral cavity etch measurements of 8-superlattice layer nanowire test structures (NWTS) using optical Mueller matrix spectroscopic ellipsometry (MMSE), x-ray diffraction (XRD), and x-ray reflectivity (XRR) |
| 网址 | |
| DOI |
10.1117/12.3052209
doi
|
| 其它 |
期刊：Metrology, Inspection, and Process Control XXXIX 作者：Ezra Mel B. Pasikatan; George A. Antonelli; Nicholas Keller; Subhadeep Kal; Matthew Rednor; et al 出版日期：2025-05-05 |
| 求助人 | |
| 下载 | 暂无链接，等待应助者上传 |
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(2025-6-4)
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