| 标题 |
Improvement in performance and reliability with CF4plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor |
| 网址 | |
| DOI | |
| 其它 |
期刊:Semiconductor Science and Technology 作者:Ching-Lin Fan; Yi-Yan Lin; Chun-Chieh Yang 出版日期:2012-01-25 |
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(2025-6-4)