| 标题 |
Insights into the effect of susceptor rotational speed in CVD reactor on the quality of 4H-SiC epitaxial layer on homogeneous substrates |
| 网址 | |
| DOI | |
| 其它 |
期刊:Materials today communications 作者:Zhuorui Tang; Lin Gu; Lei Jin; Kefeng Dai; Chaobin Mao; et al 出版日期:2024-01-05 |
| 求助人 | |
| 下载 | 求助已完成,仅限求助人下载。 |
PDF的下载单位、IP信息已删除
(2025-6-4)