| 标题 |
Physics-informed unsupervised neural network for parametric analysis and reconstruction via scatterometry evaluation (PUNN-PARSE) of grating structures on extreme ultra-violet collector mirror |
| 网址 | |
| DOI | |
| 其它 |
期刊:Measurement Science and Technology 作者:Yunyi Chen; Zexu Liu; Nan Lin 出版日期:2025-08-06 |
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(2025-6-4)