| 标题 |
Atomistic insight into the surface formation mechanism of scratching 6H-SiC substrates by constructing atomic steps |
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| DOI | |
| 其它 |
期刊:Materials Science in Semiconductor Processing 作者:Zige Tian; Jinghao Yang; Xiaoye Wang; Shuhao Ye; Lingzhi Guo; et al 出版日期:2025-06-18 |
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(2025-6-4)