| 标题 |
 Interfacial negative charges in PECVD-SiO2/Si films: Correlating Si 2p XPS with electrical properties to construct a physically consistent model |
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| DOI | |
| 其它 |
期刊：Journal of Applied Physics 作者：Sakura N. Takeda; Emilia E. Hashamova; Sai Hasegawa; Mutsunori Uenuma; Tomoyuki Miyao; et al 出版日期：2025 |
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(2025-6-4)
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