| 标题 |
High throughput multiplexing reactor design for rapid screening of atomic/molecular layer deposition processes |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Vacuum Science & Technology A 作者:Yuri Choe; Duncan Reece; David S. Bergsman 出版日期:2024-02-12 |
| 求助人 | |
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(2025-6-4)