| 标题 |
Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation |
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| DOI | |
| 其它 |
期刊:Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 作者:C. Bessouet; S. Lemettre; C. Kutyla; A. Bosseboeuf; P. Coste; et al 出版日期:2021-08-18 |
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(2025-6-4)