| 标题 |
Area-Selective Atomic Layer Deposition on Metal/Dielectric Patterns: Amphiphobic Coating, Vaporizable Inhibitors, and Regenerative Processing |
| 网址 | |
| DOI | |
| 其它 |
期刊:ACS Applied Materials and Interfaces 作者:Chia-Wei Chang; Yu‐Hsuan Tseng; Chain-Shu Hsu; Jiun-Tai Chen 出版日期:2023-06-02 |
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(2025-6-4)