| 标题 |
Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review |
| 网址 | |
| DOI | |
| 其它 |
期刊:Current Applied Physics 作者:Se Eun Kim; Ju Young Sung; Yewon Yun; Byeongjun Jeon; Sang Mo Moon; et al 出版日期:2024-05-12 |
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(2025-6-4)