| 标题 |
Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of vacuum science & technology 作者:Chan Xue; De‐Qi Wen; Wei Liu; Yu‐Ru Zhang; Fei Gao; et al 出版日期:2016-11-15 |
| 求助人 | |
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(2025-6-4)