| 标题 |
AMICM: A high-precision grating metrology framework via interpretable machine learning and scatterometry |
| 网址 | |
| DOI | |
| 其它 |
期刊:Optics and Lasers in Engineering 作者:Shengquan Nian; Andong Xie; Shijie Liu; Qi Lu; Yunxia Jin; et al 出版日期:2026-08-01 |
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(2025-6-4)