| 标题 |
Novel EUV Resists Materials for 16nm HP and beyond |
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| DOI | |
| 其它 |
期刊:Journal of Photopolymer Science and Technology 作者:Kazunori Sakai; Motohiro Shiratani; Tomohisa Fujisawa; Koji Inukai; Kaori Sakai; et al 出版日期:2014 |
| 求助人 | |
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(2025-6-4)