| 标题 |
Comparative near infrared through-focus scanning optical microscopy for 3D memory subsurface defect detection and classification |
| 网址 | |
| DOI | |
| 其它 |
期刊:Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV 作者:Jun Ho Lee; Seokjin Na; Junhee Jeong; Ralf Buengener 出版日期:2021-02-19 |
| 求助人 | |
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(2025-6-4)