| 标题 |
Improving film thickness uniformity on curved substrates via planar and cylindrical magnetron sputtering: Simulation and experimental validation |
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| DOI | |
| 其它 |
期刊:Vacuum 作者:Ravit Pulyani; Simran Atwal; S.K. Ghosh; D. Bhattacharyya; A. Biswas 出版日期:2026-07-01 |
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(2025-6-4)