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Flat-fop femtosecond laser-induced thinning of SiC wafer substrate: Mechanisms, defect control, and process optimization |
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期刊:Optics and Laser Technology 作者:Yuhang Li; Lei Chen; Haiyan Shi; Xinya Peng; Zhe Zhang; et al 出版日期:2025-12-05 |
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(2025-6-4)