| 标题 |
Differentiable Etch Proximity Correction with Transformer-Based Optimization |
| 网址 | |
| DOI | |
| 其它 |
期刊:IEEE Transactions on Semiconductor Manufacturing 作者:S. Lee; Guandao Yang; Suyeon Choi; Seongtae Jeong; Gordon Wetzstein 出版日期:2026-01-01 |
| 求助人 | |
| 下载 | 求助已完成,仅限求助人或该文件上传人下载。 |
PDF的下载单位、IP信息已删除
(2025-6-4)