| 标题 |
A Comparative Study of the Physical Properties of SiN Thin Films Deposited by LPCVD, PECVD, and Reactive Sputtering for Photonic Device Integration |
| 网址 | |
| DOI | |
| 其它 |
期刊:2025 Photonics North (PN) 作者:Abir Radi; Brahim Ahammou; Leila Mehrvar; Youssef Ouldhnini; Majid Taghavi; et al 出版日期:2025 |
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(2025-6-4)