| 标题 |
Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms |
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| 其它 |
期刊:Plasma Sources Science and Technology 作者:Aranka Derzsi; Trevor Lafleur; Jean-Paul Booth; Ihor Korolov; Zoltán Donkó 出版日期:2015-12-01 |
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(2025-6-4)