| 标题 |
Citric Acid as a Complexing Agent in CMP of Copper Investigation of Surface Reactions Using Impedance Spectroscopy
柠檬酸在铜CMP中作为络合剂表面反应的阻抗谱研究
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| 其它 | GORANTLA V R K, ASSIONGBON K A, BABU V, et al. Citric Acid as a Complexing Agent in CMP of Copper Investigation of Surface Reactions Using Impedance Spectroscopy [J]. Journal of the Electrochemical Society, 2005, 152(5): G404-G10. |
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(2025-6-4)
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